LIGHT-ION SPUTTERING OF LOW Z-MATERIALS IN THE TEMPERATURE-RANGE 20 - 1100-DEGREES-C

被引:14
作者
BOHDANSKY, J
ROTH, J
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D O I
10.1016/0022-3115(84)90278-2
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T [工业技术];
学科分类号
08 ;
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页码:1417 / 1424
页数:8
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