HYDROGEN RETENTION AND RELEASE DYNAMICS OF AMORPHOUS-CARBON FILMS EXPOSED TO A HYDROGEN PLASMA

被引:22
作者
SUGAI, H
YOSHIDA, S
TOYODA, H
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D O I
10.1063/1.100683
中图分类号
O59 [应用物理学];
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页码:1412 / 1414
页数:3
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