共 9 条
[3]
PLASMA-ENHANCED DEPOSITION OF SILICON-NITRIDE FROM SIH4-N2 MIXTURE
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS,
1983, 22 (05)
:L321-L323
[4]
KAWAI S, 1982, SID 82, P42
[5]
OKUBO Y, 1982, SID 82 DIGEST, P40
[7]
APPLICATION OF AMORPHOUS-SILICON FIELD-EFFECT TRANSISTORS IN ADDRESSABLE LIQUID-CRYSTAL DISPLAY PANELS
[J].
APPLIED PHYSICS,
1981, 24 (04)
:357-362
[9]
SUZUKI K, 1983, SID 83, P146