STRUCTURE-RELATED BULK LOSSES IN ZRO2 OPTICAL THIN-FILMS

Results of measurements of bulk scattering as well as absorption losses of evaporated ZrO2 single-layer films are presented. A special layer design was used to eliminate the losses originating from the film interfaces. The scattering and absorption measurements are performed at λ = 515 nm by means of total integrated scattering and photoacoustic techniques, respectively. Transmission electron micrographs of C-Pt replicas of cross-sections and electron diffraction studies reveal the correlations between bulk losses and morphology. The compositional depth profiles of the films were investigated by secondary neutral mass spectrometry. The observed absorption can be explained by contaminations homogeneously distributed throughout the film thickness. The results are discussed with respect to different deposition conditions and post-deposition annealing. © 1990.