MICRO-PROBE REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION TECHNIQUE .3. OBSERVATION OF POLYCRYSTALLINE SILICON FILM ON CRYSTALLINE SILICON SUBSTRATE IRRADIATED BY CONTINUOUS-WAVE AR+-LASER

被引：4

作者：

ICHIKAWA, M

OHKURA, M

HAYAKAWA, K

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1983年 / 22卷 / 03期

关键词：

D O I：

10.1143/JJAP.22.527

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：527 / 533

页数：7

共 25 条

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