OPTICAL-PROPERTIES OF RAPID FURNACE ANNEALED HE+ IMPLANTED LINBO3 WAVE-GUIDES

被引：9

作者：

ALCHALABI, SAM ^{[1
]}

WEISS, BL ^{[1
]}

HOMEWOOD, KP ^{[1
]}

机构：

[1] UNIV SURREY,DEPT ELECTR & ELECT ENGN,GUILDFORD GU2 5XH,SURREY,ENGLAND

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 28卷 / 02期

关键词：

D O I：

10.1016/0168-583X(87)90114-5

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：255 / 258

页数：4

共 7 条

[1] LOW-LOSS HE-4(+) IMPLANTED LINBO3 WAVE-GUIDE PRODUCED BY TRANSIENT ANNEALING [J].

ALCHALABI, SAM .

APPLIED PHYSICS LETTERS, 1985, 47 (06) :564-566

[2]

ALCHALABI SAM, 1986, RAD EFF, V98, P393

[3] FORMATION OF WAVE-GUIDES AND MODULATORS IN LINBO3 BY ION-IMPLANTATION [J].

DESTEFANIS, GL ;

GAILLIARD, JP ;

LIGEON, EL ;

VALETTE, S ;

FARMERY, BW ;

TOWNSEND, PD ;

PEREZ, A .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (12) :7898-7905

[4] ION-IMPLANTATION INTO LINBO3 [J].

GOTZ, G ;

KARGE, H .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY) :1079-1088

[5] OPTICAL-PROPERTIES OF PLANAR WAVE-GUIDES FORMED BY HE+ IMPLANTATION IN LINBO3 [J].

NADEN, JM ;

WEISS, BL .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 1985, 3 (04) :855-859

[6] THERMAL ANNEALING OF HE+ IMPLANTED OPTICAL WAVE-GUIDES IN LINBO3 [J].

NADEN, JM ;

WEISS, BL .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 1986, 4 (09) :1402-1406

[7]

SEALY BJ, 1985, MRS, V4, P361

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