LOW-LOSS HE-4(+) IMPLANTED LINBO3 WAVE-GUIDE PRODUCED BY TRANSIENT ANNEALING

被引：13

作者：

ALCHALABI, SAM

机构：

来源：

APPLIED PHYSICS LETTERS | 1985年 / 47卷 / 06期

关键词：

D O I：

10.1063/1.96072

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：564 / 566

页数：3

共 15 条

[1]

ALCHALABI SAM, UNPUB

[2] CHANNELING STUDIES OF DEPTH OF DAMAGE PRODUCED IN LINBO3 BY 50-1100 KEV HE-4+ IMPLANTATIONS [J].

BARFOOT, KM ;

WEISS, BL .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1984, 17 (03) :L47-L52

[3] PULSE ELECTRON ANNEALING OF ION-IMPLANTED INP [J].

DAVIES, DE ;

LORENZO, JP ;

RYAN, TG ;

FITZGERALD, JJ .

APPLIED PHYSICS LETTERS, 1979, 35 (08) :631-633

[4] FORMATION OF WAVE-GUIDES AND MODULATORS IN LINBO3 BY ION-IMPLANTATION [J].

DESTEFANIS, GL ;

GAILLIARD, JP ;

LIGEON, EL ;

VALETTE, S ;

FARMERY, BW ;

TOWNSEND, PD ;

PEREZ, A .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (12) :7898-7905

[5] MULTIPLY SCANNED ELECTRON-BEAM ANNEALING OF ION-IMPLANTED INDIUM-PHOSPHIDE [J].

GILL, SS .

APPLIED PHYSICS LETTERS, 1982, 41 (08) :729-731

[6] PULSED LASER ANNEALING OF SELENIUM IMPLANTED INP [J].

GILL, SS ;

TOPHAM, PJ ;

SEALY, BJ ;

STEPHENS, KG .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1981, 14 (12) :2333-&

[7] ION-IMPLANTATION INTO LINBO3 [J].

GOTZ, G ;

KARGE, H .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY) :1079-1088

[8]

HOLMAN RL, 1981, P SOC PHOTO-OPT INST, V317, P47

[9] RADIATION-DAMAGE AND REFRACTIVE-INDEX OF ION-IMPLANTED LINBO3 [J].

KARGE, H ;

GOTZ, G ;

JAHN, U ;

SCHMIDT, S .

NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR) :777-780

[10] ION-IMPLANTED OPTICAL-WAVEGUIDES IN LINBO3 [J].

KING, GDH ;

BONE, MC ;

WEISS, BL ;

WEEKS, DW .

ELECTRONICS LETTERS, 1981, 17 (23) :897-898

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