DIELECTRIC PROPERTIES OF FILMS PREPARED BY REACTIVE SPUTTERING OF TA IN O2-N2 MIXTURES

被引：3

作者：

INGREY, SJ ^{[1
]}

WESTWOOD, WD ^{[1
]}

MACLAURIN, BK ^{[1
]}

机构：

[1] BELL NO RES,STN C,POB 3511,OTTAWA,ONTARIO,CANADA

来源：

THIN SOLID FILMS | 1975年 / 30卷 / 02期

关键词：

D O I：

10.1016/0040-6090(75)90102-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：377 / 381

页数：5

相关论文

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