DIFFERENCES IN PHYSICAL-PROPERTIES OF HYDROGENATED AND FLUORINATED AMORPHOUS-SILICON CARBIDE PREPARED BY REACTIVE SPUTTERING

被引：21

作者：

DEMICHELIS, F ^{[1
]}

PIRRI, CF ^{[1
]}

TRESSO, E ^{[1
]}

STAPINSKI, T ^{[1
]}

机构：

[1] STANISLAW STASZIC UNIV MIN & MET, DEPT PHYS & ELECTR TECHNOL, PL-30059 KRAKOW, POLAND

来源：

JOURNAL OF APPLIED PHYSICS | 1992年 / 71卷 / 11期

关键词：

D O I：

10.1063/1.350496

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The paper deals with structural, optical, and electrical properties of a-SiC:H and a-SiC:H,F films prepared by rf sputtering of a silicon target in Ar + H-2 + CH4 and Ar + H-2 + CF4 gas mixtures, respectively. The comparison of the physical properties of the two different sets of the samples has been considered and the influence of hydrogen and/or fluorine incorporation is examined and discussed.

引用

页码：5641 / 5645

页数：5

共 24 条

[11] LUCOVSKY G, 1984, PHYSICS HYDROGENATED, V2, P339
[12] ELECTRICAL AND OPTICAL-PROPERTIES OF AMORPHOUS SI-F-H ALLOYS
MADAN, A
OVSHINSKY, SR
BENN, E
[J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1979, 40 (04): : 259 - 277
[13] MORIMOTO A, 1985, JPN J APPL PHYS, V24, P908
[14] MOTT NF, 1970, ELECTRONIC PROCESS N, P284
[15] Nakamoto K., 1963, INFRARED SPECTRA INO
[16] OVSINSKY SR, 1978, NATURE, V276, P483
[17] ROBERTSON J, 1986, ADV PHYS, V35, P317, DOI 10.1080/00018738600101911
[18] PROPERTIES OF HYDROGENATED AND FLUORINATED AMORPHOUS-SILICON CARBON ALLOY-FILMS PREPARED BY MAGNETRON SPUTTERING
SAITO, N
[J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1987, 55 (05): : 615 - 625
[19] URBACH TAIL AND GAP STATES IN HYDROGENATED A-SIC AND A-SIGE ALLOYS
SKUMANICH, A
FROVA, A
AMER, NM
[J]. SOLID STATE COMMUNICATIONS, 1985, 54 (07) : 597 - 601
[20] LUMINESCENCE AND ELECTRON-SPIN-RESONANCE STUDIES OF DEFECTS IN HYDROGENATED AMORPHOUS-SILICON
STREET, RA
BIEGELSEN, DK
[J]. SOLID STATE COMMUNICATIONS, 1980, 33 (12) : 1159 - 1162

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