INTRINSIC STRESS MEASUREMENTS AS A QUANTITATIVE MEASURE OF THE GROWTH-MORPHOLOGY TRANSITION IN A-SI-H

[1] CAMBEL DS, 1970, HDB THIN FILM TECHNO, pCH12

[2] SMALL-ANGLE-SCATTERING EVIDENCE OF VOIDS IN HYDROGENATED AMORPHOUS SILICON [J]. PHYSICAL REVIEW LETTERS, 1979, 43 (16) : 1161 - 1163

[3] COLUMNAR MICROSTRUCTURE IN VAPOR-DEPOSITED THIN-FILMS [J]. THIN SOLID FILMS, 1977, 47 (03) : 219 - 233

[4] EFFECT OF SILANE DILUTION ON INTRINSIC STRESS IN GLOW-DISCHARGE HYDROGENATED AMORPHOUS-SILICON FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1984, 55 (04) : 946 - 951

[5] MICROSTRUCTURE OF PLASMA-DEPOSITED A-SI-H FILMS [J]. APPLIED PHYSICS LETTERS, 1979, 35 (03) : 244 - 246

[6] EFFECTS OF INERT-GAS DILUTION OF SILANE ON PLASMA-DEPOSITED A-SI-H FILMS [J]. APPLIED PHYSICS LETTERS, 1981, 38 (05) : 331 - 333

[7] MEASUREMENT OF THE DENSITY OF GAP STATES IN HYDROGENATED AMORPHOUS-SILICON BY SPACE-CHARGE SPECTROSCOPY [J]. PHYSICAL REVIEW B, 1982, 25 (08) : 5285 - 5320

[8] STRUCTURE OF AMORPHOUS (GE,SI)1-XYX ALLOYS [J]. PHYSICAL REVIEW LETTERS, 1979, 42 (17) : 1151 - 1154

[9] POSTOL TA, 1980, PHYS REV LETT, V45, P648, DOI 10.1103/PhysRevLett.45.648

[10] PROTON MAGNETIC-RESONANCE SPECTRA OF PLASMA-DEPOSITED AMORPHOUS SI-H FILMS [J]. PHYSICAL REVIEW LETTERS, 1980, 44 (03) : 193 - 196

[1] CAMBEL DS, 1970, HDB THIN FILM TECHNO, pCH12

[2] SMALL-ANGLE-SCATTERING EVIDENCE OF VOIDS IN HYDROGENATED AMORPHOUS SILICON [J]. PHYSICAL REVIEW LETTERS, 1979, 43 (16) : 1161 - 1163

[3] COLUMNAR MICROSTRUCTURE IN VAPOR-DEPOSITED THIN-FILMS [J]. THIN SOLID FILMS, 1977, 47 (03) : 219 - 233

[4] EFFECT OF SILANE DILUTION ON INTRINSIC STRESS IN GLOW-DISCHARGE HYDROGENATED AMORPHOUS-SILICON FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1984, 55 (04) : 946 - 951

[5] MICROSTRUCTURE OF PLASMA-DEPOSITED A-SI-H FILMS [J]. APPLIED PHYSICS LETTERS, 1979, 35 (03) : 244 - 246

[6] EFFECTS OF INERT-GAS DILUTION OF SILANE ON PLASMA-DEPOSITED A-SI-H FILMS [J]. APPLIED PHYSICS LETTERS, 1981, 38 (05) : 331 - 333

[7] MEASUREMENT OF THE DENSITY OF GAP STATES IN HYDROGENATED AMORPHOUS-SILICON BY SPACE-CHARGE SPECTROSCOPY [J]. PHYSICAL REVIEW B, 1982, 25 (08) : 5285 - 5320

[8] STRUCTURE OF AMORPHOUS (GE,SI)1-XYX ALLOYS [J]. PHYSICAL REVIEW LETTERS, 1979, 42 (17) : 1151 - 1154

[9] POSTOL TA, 1980, PHYS REV LETT, V45, P648, DOI 10.1103/PhysRevLett.45.648

[10] PROTON MAGNETIC-RESONANCE SPECTRA OF PLASMA-DEPOSITED AMORPHOUS SI-H FILMS [J]. PHYSICAL REVIEW LETTERS, 1980, 44 (03) : 193 - 196