NON-DESTRUCTIVE DEPTH PROFILING THROUGH QUANTITATIVE-ANALYSIS OF SURFACE ELECTRON-SPECTRA

被引:96
作者
TOUGAARD, S
HANSEN, HS
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D O I
10.1002/sia.740141109
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:730 / 738
页数:9
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