SCANNING-TUNNELING-MICROSCOPE OBSERVATION OF THE HOMOEPITAXIAL DIAMOND(001) 2X1 RECONSTRUCTION OBSERVED UNDER ATMOSPHERIC-PRESSURE

被引:122
作者
KAWARADA, H
SASAKI, H
SATO, A
机构
[1] School of Science and Engineering, Waseda University, Shinjuku-ku, Tokyo 169
关键词
D O I
10.1103/PhysRevB.52.11351
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The 2X1/1X2 surface reconstruction of a homoepitaxial diamond (001) surface has been examined using a scanning tunneling microscope at an atomic scale and reflection electron microscopy at a macroscopic scale. The monohydride dimer, which is a unit of the surface reconstruction, has a symmetric structure. These monohydride structures contribute to the surface p-type conduction in undoped films. The surface is composed of elongated dimer rows. Antiphase boundaries have been observed, which is indicative of low-temperature epitaxy where surface migration is limited. Macroscopic surface flatness has been improved during the growth stage in the presence of oxygen and boron which enhance migration.
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页码:11351 / 11358
页数:8
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