GAEDE-LANGMUIR LECTURE - STATIC SIMS APPLICATIONS - FROM SILICON SINGLE-CRYSTAL OXIDATION TO DNA SEQUENCING

被引：61

作者：

BENNINGHOVEN, A

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期

关键词：

D O I：

10.1116/1.573015

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

收藏

页码：451 / 460

页数：10

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[11] FOGEL YM, 1966, SOV PHYS-SOLID STATE, V7, P1572
[12] A COMBINED INSTRUMENT FOR THE INVESTIGATION OF CATALYTIC REACTIONS BY MEANS OF GAS-CHROMATOGRAPHY, SECONDARY ION AND GAS-PHASE MASS-SPECTROMETRY, AUGER AND PHOTOELECTRON-SPECTROSCOPY, AND ION-SCATTERING SPECTROSCOPY
GANSCHOW, O
JEDE, R
AN, LD
MANSKE, E
NEELSEN, J
WIEDMANN, L
BENNINGHOVEN, A
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (03): : 1491 - 1506
[13] UHV PREPARATION OF ORGANIC OVERLAYERS BY A MOLECULAR-BEAM TECHNIQUE
HOLTKAMP, D
LANGE, W
JIRIKOWSKY, M
BENNINGHOVEN, A
[J]. APPLIED SURFACE SCIENCE, 1984, 17 (03) : 296 - 308
[14] SPUTTERING OF SURFACES BY POSITIVE ION BEAMS OF LOW ENERGY
HONIG, RE
[J]. JOURNAL OF APPLIED PHYSICS, 1958, 29 (03) : 549 - 555
[15] SECONDARY ION EMISSION FROM UHV-DEPOSITED AMINO-ACID OVERLAYERS ON METALS
LANGE, W
JIRIKOWSKY, M
BENNINGHOVEN, A
[J]. SURFACE SCIENCE, 1984, 136 (2-3) : 419 - 436