A VERSATILE SUBSTRATE HEATER FOR USE IN HIGHLY OXIDIZING ATMOSPHERES

被引：23

作者：

ESTLER, RC

NOGAR, NS

MUENCHAUSEN, RE

WU, XD

FOLTYN, S

GARCIA, AR

机构：

[1] UNIV CALIF LOS ALAMOS SCI LAB,CTR EXPLORATORY RES & DEV,DIV MAT SCI & TECHNOL,LOS ALAMOS,NM 87545

[2] FT LEWIS COLL,DEPT CHEM,DURANGO,CO 81301

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1991年 / 62卷 / 02期

关键词：

D O I：

10.1063/1.1142139

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We report the design, construction and performance of a versatile substrate heater that meets the severe design constraints of heating substrates to high temperatures (less-than-or-equal-to 900-degrees-C) in relatively high pressures (hundreds of Torr) of oxidizing gases. The heater has been used to heat substrates by both thermal conduction via a conductive high temperature cement and by direct radiation. In particular, the production of high-quality YBa2Cu3O7-delta thin films grown on radiatively heated LaAlO3 substrates is demonstrated using the pulsed laser deposition (PLD) technique.

引用

页码：437 / 440

页数：4