DYNAMICS OF ZIRCONIUM-OXIDE THIN-FILM GROWTH AND ION-BEAM ETCHING

被引:30
作者
MULLER, KH
NETTERFIELD, RP
MARTIN, PJ
机构
来源
PHYSICAL REVIEW B | 1987年 / 35卷 / 06期
关键词
D O I
10.1103/PhysRevB.35.2934
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:2934 / 2941
页数:8
相关论文
共 29 条
[1]   EFFECT OF ION ASSISTED DEPOSITION ON OPTICAL SCATTER AND SURFACE MICROSTRUCTURE OF THIN-FILMS [J].
ALJUMAILY, GA ;
MCNALLY, JJ ;
MCNEIL, JR ;
HERRMANN, WC .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03) :651-655
[2]  
ALLEN TH, 1983, 1983 P INT ION ENG C, P1305
[3]   AN INVESTIGATION OF ION-BOMBARDED AND ANNEALED (111) SURFACES OF GE BY SPECTROSCOPIC ELLIPSOMETRY [J].
ASPNES, DE ;
STUDNA, AA .
SURFACE SCIENCE, 1980, 96 (1-3) :294-306
[4]  
Biersack J. P., 1982, ION IMPLANTATION TEC, P122, DOI DOI 10.1007/978-3-642-68779-2_5
[5]   SPUTTERING STUDIES WITH THE MONTE-CARLO PROGRAM TRIM.SP [J].
BIERSACK, JP ;
ECKSTEIN, W .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 34 (02) :73-94
[6]  
CHERNOV AA, 1984, SPRINGER SERIES SOLI, V36, P90
[7]   SIMULATION OF STRUCTURAL ANISOTROPY AND VOID FORMATION IN AMORPHOUS THIN-FILMS [J].
HENDERSON, D ;
BRODSKY, MH ;
CHAUDHARI, P .
APPLIED PHYSICS LETTERS, 1974, 25 (11) :641-643
[8]  
HERRMANN WC, 1982, P SOC PHOTO-OPT INST, V325, P101, DOI 10.1117/12.933292
[9]   OPTICAL AND CRYSTALLINE INHOMOGENEITY IN EVAPORATED ZIRCONIA FILMS [J].
KLINGER, RE ;
CARNIGLIA, CK .
APPLIED OPTICS, 1985, 24 (19) :3184-3187
[10]  
Leamy H. J., 1980, Current topics in materials science. Vol.6, P309