ELECTRON-CYCLOTRON RESONANCE PLASMA STREAM SOURCE FOR PLASMA ENHANCED CHEMICAL VAPOR-DEPOSITION

被引：46

作者：

POPOV, OA

WALDRON, H

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.575820

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

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页码：914 / 917

页数：4

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