TEMPERATURE-DEPENDENT SPUTTERING OF METALS AND INSULATORS

被引：88

作者：

SIGMUND, P

SZYMONSKI, M

机构：

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1984年 / 33卷 / 03期

关键词：

D O I：

10.1007/BF00618747

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：141 / 152

页数：12

共 52 条

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