ION-BEAM MIXING OF MARKER LAYERS INTO AMORPHOUS ALUMINUM-OXIDE

被引：9

作者：

COOPER, EA

NASTASI, M

机构：

[1] Los Alamos National Laboratory, Materials Division, Los Alamos

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1994年 / 91卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(94)96285-5

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Thin layers of various marker species embedded in amorphous Al2O3 were ion beam mixed with 210 keV Ar in a temperature range of -166-degrees-C to 790-degrees-C. All of the metal markers (Ag, Fe, and Zr) were found to mix only to a ballistic level. The oxide markers studied were Fe2O3, Cr2O3, Y2O3, and ZrO2. Thermally assisted ion mixing was seen, in decreasing amounts, in Fe2O3, Y203, and Cr2O3. No thermally assisted ion beam mixing was observed for ZrO2 or the metal markers.

引用

页码：558 / 561

页数：4

共 12 条

[1]

[Anonymous], 1964, PHASE DIAGRAMS CERAM, V1

[2] ION MIXING IN AL,SI, AND THEIR OXIDES [J].

BARCZ, AJ ;

NICOLET, MA .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 33 (03) :167-173

[3]

Chu W.-K., 1978, BACKSCATTERING SPECT

[4] ION-BEAM MIXING OF IRON-OXIDE MARKER LAYERS IN DOPED AND UNDOPED ALUMINA THIN-FILMS [J].

COOPER, EA ;

NASTASI, M .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1994, 77 (01) :268-270

[5]

COOPER EA, 1993, MATER RES SOC SYMP P, V279, P457

[6]

DOOLITTLE LR, 1985, NUCL INSTRUM METH B, V9, P334

[7]

JOSLIN DL, 1992, MATER RES SOC SYMP P, V235, P351

[8]

MAYER JW, 1983, SURFACE MODIFICATION, P241

[9]

MCHARGUE CJ, 1989, STRUCTURE PROPERTY R, P117

[10]

NASTASI M, IN PRESS RAD EFF DEF

← 1 2 →