共 12 条
[1]
BRUCE RH, 1980, 2ND P INT S DRY PROC, P131
[2]
Coburn J.W., 1982, PLASMA CHEM PLASMA P, V2, P1, DOI 10.1007/BF00566856
[5]
FITE WL, 1962, ATOMIC MOLECULAR PRO, P421
[6]
HARSHBARGER WR, 1976, P MICROELECTRONICS S, P43
[7]
KAWATA H, 1982, J ELECTROCHEM SOC, V129, P1325, DOI 10.1149/1.2124129