SPATIAL DEPENDENCE OF THE OPTICAL-EMISSION INTENSITIES FROM CF4+O2 PLASMAS

被引:7
作者
KAWATA, H
MURATA, K
NAGAMI, K
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1986年 / 4卷 / 01期
关键词
D O I
10.1116/1.583354
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:6 / 9
页数:4
相关论文
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