A NEGLECTED PARAMETER (WATER CONTAMINATION) IN SPUTTERING OF MOS2 FILMS

[1] MORPHOLOGIES OF RF SPUTTER-DEPOSITED SOLID LUBRICANTS [J]. VACUUM, 1977, 27 (04) : 379 - 382

[2] THE ADSORPTION OF BENZENE AND WATER VAPOR BY MOLYBDENUM DISULFIDE [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1953, 57 (07) : 653 - 657

[3] BUCK V, 1986, VACUUM TAIP, V31, P89

[4] BUCK V, 1983, DFVLR NACHR, V40, P30

[5] RF SPUTTERED MOS2 PARAMETER EFFECTS ON WEAR LIFE [J]. THIN SOLID FILMS, 1979, 64 (02) : 223 - 229

[6] DAYTON B, 1962, 8TH T VAC S P 2ND IN, V1, P42

[7] STOICHIOMETRY AND FRICTION PROPERTIES OF SPUTTERED MOSX LAYERS [J]. THIN SOLID FILMS, 1985, 129 (1-2) : 79 - 91

[8] EFFECTS OF CRYSTALLITE ORIENTATION ON ENVIRONMENTAL STABILITY AND LUBRICATION PROPERTIES OF SPUTTERED MOS2 THIN-FILMS [J]. ASLE TRANSACTIONS, 1984, 27 (01): : 82 - 88

[9] FLEISCHAUER PD, 1984, ASLE SPEC PUBL, V14, P223

[10] FLEISCHAUER PD, 1984, ASLE SPEC PUBL, V14

[1] MORPHOLOGIES OF RF SPUTTER-DEPOSITED SOLID LUBRICANTS [J]. VACUUM, 1977, 27 (04) : 379 - 382

[2] THE ADSORPTION OF BENZENE AND WATER VAPOR BY MOLYBDENUM DISULFIDE [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1953, 57 (07) : 653 - 657

[3] BUCK V, 1986, VACUUM TAIP, V31, P89

[4] BUCK V, 1983, DFVLR NACHR, V40, P30

[5] RF SPUTTERED MOS2 PARAMETER EFFECTS ON WEAR LIFE [J]. THIN SOLID FILMS, 1979, 64 (02) : 223 - 229

[6] DAYTON B, 1962, 8TH T VAC S P 2ND IN, V1, P42

[7] STOICHIOMETRY AND FRICTION PROPERTIES OF SPUTTERED MOSX LAYERS [J]. THIN SOLID FILMS, 1985, 129 (1-2) : 79 - 91

[8] EFFECTS OF CRYSTALLITE ORIENTATION ON ENVIRONMENTAL STABILITY AND LUBRICATION PROPERTIES OF SPUTTERED MOS2 THIN-FILMS [J]. ASLE TRANSACTIONS, 1984, 27 (01): : 82 - 88

[9] FLEISCHAUER PD, 1984, ASLE SPEC PUBL, V14, P223

[10] FLEISCHAUER PD, 1984, ASLE SPEC PUBL, V14