STOICHIOMETRY AND FRICTION PROPERTIES OF SPUTTERED MOSX LAYERS

被引：105

作者：

DIMIGEN, H ^{[1
]}

HUBSCH, H ^{[1
]}

WILLICH, P ^{[1
]}

REICHELT, K ^{[1
]}

机构：

[1] FORSCHUNGSZENTRUM JULICH, INST FESTKORPERFORSCH, D-5170 JULICH 1, FED REP GER

来源：

THIN SOLID FILMS | 1985年 / 129卷 / 1-2期

关键词：

MOLYBDENUM SULFIDE;

D O I：

10.1016/0040-6090(85)90097-5

中图分类号：

T [工业技术];

学科分类号：

08 [工学];

摘要：

引用

页码：79 / 91

页数：13

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