CHEMICAL VAPOR-DEPOSITED SILICON-NITRIDE .3. STRUCTURAL FEATURES

被引：35

作者：

NIIHARA, K ^{[1
]}

HIRAI, T ^{[1
]}

机构：

[1] TOHOKU UNIV,IRON STEEL & MET RES INST,SENDAI,MIYAGI 980,JAPAN

来源：

JOURNAL OF MATERIALS SCIENCE | 1977年 / 12卷 / 06期

关键词：

D O I：

10.1007/BF02426862

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1233 / 1242

页数：10

共 41 条

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[38]

WEISS JR, 1973, CHEM VAPOR DEPOS, P488

[39]

WILD S, 1968, SPECIAL CERAMICS 5, P377

[40]

Wild S., 1992, SPEC CERAM, V5, P385

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