QUANTITATIVE-ANALYSIS OF HE IN SOLIDS BY SPUTTERED NEUTRAL MASS-SPECTROMETRY

被引：9

作者：

GNASER, H

BAY, HL

HOFER, WO

机构：

[1] FORSCHUNGSZENTRUM JULICH, INST GRENZFLACHENFORSCH & VAKUUMPHYS, EURATOM ASSOC, D-5170 JULICH 1, FED REP GER

[2] FORSCHUNGSZENTRUM JULICH, INST PLASMA PHYS, D-5170 JULICH, FED REP GER

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574638

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1194 / 1197

页数：4

共 23 条

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MYERS, SM
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[6] Carter G., 1983, SPUTTERING PARTICLE, P231
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