SIMULATION OF SURFACE EVOLUTION DURING ION-BOMBARDMENT

[1] PREDICTION OF ION-BOMBARDED SURFACE TOPOGRAPHIES USING FRANKS KINEMATIC THEORY OF CRYSTAL DISSOLUTION [J]. JOURNAL OF MATERIALS SCIENCE, 1973, 8 (07) : 1030 - 1040

[2] EQUILIBRIUM TOPOGRAPHY OF SPUTTERED AMORPHOUS SOLIDS .2. [J]. JOURNAL OF MATERIALS SCIENCE, 1971, 6 (02) : 115 - &

[3] A 2ND-ORDER EROSION SLOWNESS THEORY OF THE DEVELOPMENT OF SURFACE-TOPOGRAPHY BY ION-INDUCED SPUTTERING [J]. JOURNAL OF MATERIALS SCIENCE, 1981, 16 (08) : 2091 - 2102

[4] GROWTH OF TOPOGRAPHY DURING SPUTTERING OF AMORPHOUS SOLIDS .4. GENERALIZED THEORY [J]. JOURNAL OF MATERIALS SCIENCE, 1973, 8 (10) : 1473 - 1481

[5] CARTER G, 1979, J MATER SCI, V14, P728

[6] CARTER G, 1986, NATO ASI SERIES E, V112

[7] EVOLUTION OF WELL-DEFINED SURFACE CONTOUR SUBMITTED TO ION-BOMBARDMENT - COMPUTER-SIMULATION AND EXPERIMENTAL INVESTIGATION [J]. JOURNAL OF MATERIALS SCIENCE, 1975, 10 (01) : 52 - 62

[8] KINEMATIC THEORY OF CRYSTAL-GROWTH AND DISSOLUTION PROCESSES .2. [J]. ZEITSCHRIFT FUR PHYSIKALISCHE CHEMIE-FRANKFURT, 1972, 77 (1-6): : 84 - &

[9] PRECISION MODELING OF THE MASK SUBSTRATE EVOLUTION DURING ION ETCHING [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (04): : 2443 - 2450

[10] KATARDJIEV IV, IN PRESS VACUUM

[1] PREDICTION OF ION-BOMBARDED SURFACE TOPOGRAPHIES USING FRANKS KINEMATIC THEORY OF CRYSTAL DISSOLUTION [J]. JOURNAL OF MATERIALS SCIENCE, 1973, 8 (07) : 1030 - 1040

[2] EQUILIBRIUM TOPOGRAPHY OF SPUTTERED AMORPHOUS SOLIDS .2. [J]. JOURNAL OF MATERIALS SCIENCE, 1971, 6 (02) : 115 - &

[3] A 2ND-ORDER EROSION SLOWNESS THEORY OF THE DEVELOPMENT OF SURFACE-TOPOGRAPHY BY ION-INDUCED SPUTTERING [J]. JOURNAL OF MATERIALS SCIENCE, 1981, 16 (08) : 2091 - 2102

[4] GROWTH OF TOPOGRAPHY DURING SPUTTERING OF AMORPHOUS SOLIDS .4. GENERALIZED THEORY [J]. JOURNAL OF MATERIALS SCIENCE, 1973, 8 (10) : 1473 - 1481

[5] CARTER G, 1979, J MATER SCI, V14, P728

[6] CARTER G, 1986, NATO ASI SERIES E, V112

[7] EVOLUTION OF WELL-DEFINED SURFACE CONTOUR SUBMITTED TO ION-BOMBARDMENT - COMPUTER-SIMULATION AND EXPERIMENTAL INVESTIGATION [J]. JOURNAL OF MATERIALS SCIENCE, 1975, 10 (01) : 52 - 62

[8] KINEMATIC THEORY OF CRYSTAL-GROWTH AND DISSOLUTION PROCESSES .2. [J]. ZEITSCHRIFT FUR PHYSIKALISCHE CHEMIE-FRANKFURT, 1972, 77 (1-6): : 84 - &

[9] PRECISION MODELING OF THE MASK SUBSTRATE EVOLUTION DURING ION ETCHING [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (04): : 2443 - 2450

[10] KATARDJIEV IV, IN PRESS VACUUM