COARSENING PHENOMENON OF SI CLUSTERS ON ARTIFICIAL NUCLEATION SITES

被引：6

作者：

KUMOMI, H

YONEHARA, T

机构：

来源：

APPLIED PHYSICS LETTERS | 1989年 / 54卷 / 26期

关键词：

D O I：

10.1063/1.101023

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2648 / 2650

页数：3

共 9 条

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