SYNTHESIS OF COMPOUND THIN-FILMS BY DUAL ION-BEAM DEPOSITION .2. PROPERTIES OF ALUMINUM-NITROGEN FILMS

被引：66

作者：

HENTZELL, HTG

HARPER, JME

CUOMO, JJ

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 58卷 / 01期

关键词：

D O I：

10.1063/1.335662

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：556 / 563

页数：8

共 13 条

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[7] SYNTHESIS OF COMPOUND THIN-FILMS BY DUAL ION-BEAM DEPOSITION .1. EXPERIMENTAL APPROACH [J].

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[8] GRAIN-STRUCTURE VARIATION WITH TEMPERATURE FOR EVAPORATED METAL-FILMS [J].

HENTZELL, HTG ;

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[9] THE FORMATION OF OUTGROWTHS IN CO-EVAPORATED NI-AL FILMS [J].

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