TIN-DOPED GAAS EPILAYERS GROWN BY LOW-PRESSURE METALORGANIC CHEMICAL VAPOR-DEPOSITION USING TRIETHYLGALLIUM AND TETRAETHYLTIN

被引:2
作者
LEE, MK [1 ]
CHANG, CY [1 ]
机构
[1] NATL CHENG KUNG UNIV,ELECTR & ELECT ENGN RES INST,TAINAN,TAIWAN
关键词
D O I
10.1063/1.337066
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:2831 / 2834
页数:4
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