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TIN-DOPED GAAS EPILAYERS GROWN BY LOW-PRESSURE METALORGANIC CHEMICAL VAPOR-DEPOSITION USING TRIETHYLGALLIUM AND TETRAETHYLTIN
被引:2
作者
:
LEE, MK
论文数:
0
引用数:
0
h-index:
0
机构:
NATL CHENG KUNG UNIV,ELECTR & ELECT ENGN RES INST,TAINAN,TAIWAN
NATL CHENG KUNG UNIV,ELECTR & ELECT ENGN RES INST,TAINAN,TAIWAN
LEE, MK
[
1
]
CHANG, CY
论文数:
0
引用数:
0
h-index:
0
机构:
NATL CHENG KUNG UNIV,ELECTR & ELECT ENGN RES INST,TAINAN,TAIWAN
NATL CHENG KUNG UNIV,ELECTR & ELECT ENGN RES INST,TAINAN,TAIWAN
CHANG, CY
[
1
]
机构
:
[1]
NATL CHENG KUNG UNIV,ELECTR & ELECT ENGN RES INST,TAINAN,TAIWAN
来源
:
JOURNAL OF APPLIED PHYSICS
|
1986年
/ 60卷
/ 08期
关键词
:
D O I
:
10.1063/1.337066
中图分类号
:
O59 [应用物理学];
学科分类号
:
摘要
:
引用
收藏
页码:2831 / 2834
页数:4
相关论文
共 23 条
[1]
SILICON AND GERMANIUM DOPING OF EPITAXIAL GALLIUM-ARSENIDE GROWN BY THE TRIMETHYLGALLIUM-ARSINE METHOD
[J].
BASS, SJ
论文数:
0
引用数:
0
h-index:
0
机构:
Royal Signals and Radar Establishment, Hertforshire, England, Baldock
BASS, SJ
.
JOURNAL OF CRYSTAL GROWTH,
1979,
47
(5-6)
:613
-618
[2]
TREND OF DEEP STATES IN ORGANOMETALLIC VAPOR-PHASE EPITAXIAL GAAS WITH VARYING AS-GA RATIOS
[J].
BHATTACHARYA, PK
论文数:
0
引用数:
0
h-index:
0
机构:
VARIAN ASSOCIATES,CORP SOLID STATE LAB,PALO ALTO,CA 94303
VARIAN ASSOCIATES,CORP SOLID STATE LAB,PALO ALTO,CA 94303
BHATTACHARYA, PK
;
KU, JW
论文数:
0
引用数:
0
h-index:
0
机构:
VARIAN ASSOCIATES,CORP SOLID STATE LAB,PALO ALTO,CA 94303
VARIAN ASSOCIATES,CORP SOLID STATE LAB,PALO ALTO,CA 94303
KU, JW
;
OWEN, SJT
论文数:
0
引用数:
0
h-index:
0
机构:
VARIAN ASSOCIATES,CORP SOLID STATE LAB,PALO ALTO,CA 94303
VARIAN ASSOCIATES,CORP SOLID STATE LAB,PALO ALTO,CA 94303
OWEN, SJT
;
AEBI, V
论文数:
0
引用数:
0
h-index:
0
机构:
VARIAN ASSOCIATES,CORP SOLID STATE LAB,PALO ALTO,CA 94303
VARIAN ASSOCIATES,CORP SOLID STATE LAB,PALO ALTO,CA 94303
AEBI, V
;
COOPER, CB
论文数:
0
引用数:
0
h-index:
0
机构:
VARIAN ASSOCIATES,CORP SOLID STATE LAB,PALO ALTO,CA 94303
VARIAN ASSOCIATES,CORP SOLID STATE LAB,PALO ALTO,CA 94303
COOPER, CB
;
MOON, RL
论文数:
0
引用数:
0
h-index:
0
机构:
VARIAN ASSOCIATES,CORP SOLID STATE LAB,PALO ALTO,CA 94303
VARIAN ASSOCIATES,CORP SOLID STATE LAB,PALO ALTO,CA 94303
MOON, RL
.
APPLIED PHYSICS LETTERS,
1980,
36
(04)
:304
-306
[3]
CHANG CY, 1983, J APPL PHYS, V5464, P54
[4]
IMPURITY PROFILES OF GAAS EPITAXIAL LAYERS DOPED WITH SN, SI, AND GE GROWN WITH MOLECULAR-BEAM EPITAXY
[J].
CHO, AY
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
BELL TEL LABS INC,MURRAY HILL,NJ 07974
CHO, AY
.
JOURNAL OF APPLIED PHYSICS,
1975,
46
(04)
:1733
-1735
[5]
HIGH-PURITY GAAS PREPARED FROM TRIMETHYLGALLIUM AND ARSINE
[J].
DAPKUS, PD
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT ELECT ENGN,URBANA,IL 61801
UNIV ILLINOIS,DEPT ELECT ENGN,URBANA,IL 61801
DAPKUS, PD
;
MANASEVIT, HM
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT ELECT ENGN,URBANA,IL 61801
UNIV ILLINOIS,DEPT ELECT ENGN,URBANA,IL 61801
MANASEVIT, HM
;
HESS, KL
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT ELECT ENGN,URBANA,IL 61801
UNIV ILLINOIS,DEPT ELECT ENGN,URBANA,IL 61801
HESS, KL
;
LOW, TS
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT ELECT ENGN,URBANA,IL 61801
UNIV ILLINOIS,DEPT ELECT ENGN,URBANA,IL 61801
LOW, TS
;
STILLMAN, GE
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT ELECT ENGN,URBANA,IL 61801
UNIV ILLINOIS,DEPT ELECT ENGN,URBANA,IL 61801
STILLMAN, GE
.
JOURNAL OF CRYSTAL GROWTH,
1981,
55
(01)
:10
-23
[6]
COMPENSATION MECHANISM IN LIQUID ENCAPSULATED CZOCHRALSKI GAAS - IMPORTANCE OF MELT STOICHIOMETRY
[J].
HOLMES, DE
论文数:
0
引用数:
0
h-index:
0
机构:
WRIGHT STATE UNIV,RES CTR,DAYTON,OH 45435
WRIGHT STATE UNIV,RES CTR,DAYTON,OH 45435
HOLMES, DE
;
CHEN, RT
论文数:
0
引用数:
0
h-index:
0
机构:
WRIGHT STATE UNIV,RES CTR,DAYTON,OH 45435
WRIGHT STATE UNIV,RES CTR,DAYTON,OH 45435
CHEN, RT
;
ELLIOTT, KR
论文数:
0
引用数:
0
h-index:
0
机构:
WRIGHT STATE UNIV,RES CTR,DAYTON,OH 45435
WRIGHT STATE UNIV,RES CTR,DAYTON,OH 45435
ELLIOTT, KR
;
YU, PW
论文数:
0
引用数:
0
h-index:
0
机构:
WRIGHT STATE UNIV,RES CTR,DAYTON,OH 45435
WRIGHT STATE UNIV,RES CTR,DAYTON,OH 45435
YU, PW
.
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES,
1982,
30
(07)
:949
-955
[7]
ORIGIN OF THE 0.82-EV ELECTRON TRAP IN GAAS AND ITS ANNIHILATION BY SHALLOW DONORS
[J].
LAGOWSKI, J
论文数:
0
引用数:
0
h-index:
0
LAGOWSKI, J
;
GATOS, HC
论文数:
0
引用数:
0
h-index:
0
GATOS, HC
;
PARSEY, JM
论文数:
0
引用数:
0
h-index:
0
PARSEY, JM
;
WADA, K
论文数:
0
引用数:
0
h-index:
0
WADA, K
;
KAMINSKA, M
论文数:
0
引用数:
0
h-index:
0
KAMINSKA, M
;
WALUKIEWICZ, W
论文数:
0
引用数:
0
h-index:
0
WALUKIEWICZ, W
.
APPLIED PHYSICS LETTERS,
1982,
40
(04)
:342
-344
[8]
FAST CAPACITANCE TRANSIENT APPARATUS - APPLICATION TO ZNO AND O CENTERS IN GAP PARANORMAL JUNCTIONS
[J].
LANG, DV
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
BELL TEL LABS INC,MURRAY HILL,NJ 07974
LANG, DV
.
JOURNAL OF APPLIED PHYSICS,
1974,
45
(07)
:3014
-3022
[9]
INVESTIGATION OF SN-DOPED GAAS EPILAYERS GROWN BY LOW-PRESSURE METAL-ORGANIC CHEMICAL VAPOR-DEPOSITION
[J].
LEE, MK
论文数:
0
引用数:
0
h-index:
0
LEE, MK
;
CHANG, CY
论文数:
0
引用数:
0
h-index:
0
CHANG, CY
;
SU, YK
论文数:
0
引用数:
0
h-index:
0
SU, YK
.
APPLIED PHYSICS LETTERS,
1983,
42
(01)
:88
-89
[10]
EFFECT OF GAS-PHASE STOICHIOMETRY ON DEEP LEVELS IN VAPOR-GROWN GAAS
[J].
MILLER, MD
论文数:
0
引用数:
0
h-index:
0
机构:
RCA LABS,PRINCETON,NJ 08540
RCA LABS,PRINCETON,NJ 08540
MILLER, MD
;
OLSEN, GH
论文数:
0
引用数:
0
h-index:
0
机构:
RCA LABS,PRINCETON,NJ 08540
RCA LABS,PRINCETON,NJ 08540
OLSEN, GH
;
ETTENBERG, M
论文数:
0
引用数:
0
h-index:
0
机构:
RCA LABS,PRINCETON,NJ 08540
RCA LABS,PRINCETON,NJ 08540
ETTENBERG, M
.
APPLIED PHYSICS LETTERS,
1977,
31
(08)
:538
-540
←
1
2
3
→
共 23 条
[1]
SILICON AND GERMANIUM DOPING OF EPITAXIAL GALLIUM-ARSENIDE GROWN BY THE TRIMETHYLGALLIUM-ARSINE METHOD
[J].
BASS, SJ
论文数:
0
引用数:
0
h-index:
0
机构:
Royal Signals and Radar Establishment, Hertforshire, England, Baldock
BASS, SJ
.
JOURNAL OF CRYSTAL GROWTH,
1979,
47
(5-6)
:613
-618
[2]
TREND OF DEEP STATES IN ORGANOMETALLIC VAPOR-PHASE EPITAXIAL GAAS WITH VARYING AS-GA RATIOS
[J].
BHATTACHARYA, PK
论文数:
0
引用数:
0
h-index:
0
机构:
VARIAN ASSOCIATES,CORP SOLID STATE LAB,PALO ALTO,CA 94303
VARIAN ASSOCIATES,CORP SOLID STATE LAB,PALO ALTO,CA 94303
BHATTACHARYA, PK
;
KU, JW
论文数:
0
引用数:
0
h-index:
0
机构:
VARIAN ASSOCIATES,CORP SOLID STATE LAB,PALO ALTO,CA 94303
VARIAN ASSOCIATES,CORP SOLID STATE LAB,PALO ALTO,CA 94303
KU, JW
;
OWEN, SJT
论文数:
0
引用数:
0
h-index:
0
机构:
VARIAN ASSOCIATES,CORP SOLID STATE LAB,PALO ALTO,CA 94303
VARIAN ASSOCIATES,CORP SOLID STATE LAB,PALO ALTO,CA 94303
OWEN, SJT
;
AEBI, V
论文数:
0
引用数:
0
h-index:
0
机构:
VARIAN ASSOCIATES,CORP SOLID STATE LAB,PALO ALTO,CA 94303
VARIAN ASSOCIATES,CORP SOLID STATE LAB,PALO ALTO,CA 94303
AEBI, V
;
COOPER, CB
论文数:
0
引用数:
0
h-index:
0
机构:
VARIAN ASSOCIATES,CORP SOLID STATE LAB,PALO ALTO,CA 94303
VARIAN ASSOCIATES,CORP SOLID STATE LAB,PALO ALTO,CA 94303
COOPER, CB
;
MOON, RL
论文数:
0
引用数:
0
h-index:
0
机构:
VARIAN ASSOCIATES,CORP SOLID STATE LAB,PALO ALTO,CA 94303
VARIAN ASSOCIATES,CORP SOLID STATE LAB,PALO ALTO,CA 94303
MOON, RL
.
APPLIED PHYSICS LETTERS,
1980,
36
(04)
:304
-306
[3]
CHANG CY, 1983, J APPL PHYS, V5464, P54
[4]
IMPURITY PROFILES OF GAAS EPITAXIAL LAYERS DOPED WITH SN, SI, AND GE GROWN WITH MOLECULAR-BEAM EPITAXY
[J].
CHO, AY
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
BELL TEL LABS INC,MURRAY HILL,NJ 07974
CHO, AY
.
JOURNAL OF APPLIED PHYSICS,
1975,
46
(04)
:1733
-1735
[5]
HIGH-PURITY GAAS PREPARED FROM TRIMETHYLGALLIUM AND ARSINE
[J].
DAPKUS, PD
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT ELECT ENGN,URBANA,IL 61801
UNIV ILLINOIS,DEPT ELECT ENGN,URBANA,IL 61801
DAPKUS, PD
;
MANASEVIT, HM
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT ELECT ENGN,URBANA,IL 61801
UNIV ILLINOIS,DEPT ELECT ENGN,URBANA,IL 61801
MANASEVIT, HM
;
HESS, KL
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT ELECT ENGN,URBANA,IL 61801
UNIV ILLINOIS,DEPT ELECT ENGN,URBANA,IL 61801
HESS, KL
;
LOW, TS
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT ELECT ENGN,URBANA,IL 61801
UNIV ILLINOIS,DEPT ELECT ENGN,URBANA,IL 61801
LOW, TS
;
STILLMAN, GE
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT ELECT ENGN,URBANA,IL 61801
UNIV ILLINOIS,DEPT ELECT ENGN,URBANA,IL 61801
STILLMAN, GE
.
JOURNAL OF CRYSTAL GROWTH,
1981,
55
(01)
:10
-23
[6]
COMPENSATION MECHANISM IN LIQUID ENCAPSULATED CZOCHRALSKI GAAS - IMPORTANCE OF MELT STOICHIOMETRY
[J].
HOLMES, DE
论文数:
0
引用数:
0
h-index:
0
机构:
WRIGHT STATE UNIV,RES CTR,DAYTON,OH 45435
WRIGHT STATE UNIV,RES CTR,DAYTON,OH 45435
HOLMES, DE
;
CHEN, RT
论文数:
0
引用数:
0
h-index:
0
机构:
WRIGHT STATE UNIV,RES CTR,DAYTON,OH 45435
WRIGHT STATE UNIV,RES CTR,DAYTON,OH 45435
CHEN, RT
;
ELLIOTT, KR
论文数:
0
引用数:
0
h-index:
0
机构:
WRIGHT STATE UNIV,RES CTR,DAYTON,OH 45435
WRIGHT STATE UNIV,RES CTR,DAYTON,OH 45435
ELLIOTT, KR
;
YU, PW
论文数:
0
引用数:
0
h-index:
0
机构:
WRIGHT STATE UNIV,RES CTR,DAYTON,OH 45435
WRIGHT STATE UNIV,RES CTR,DAYTON,OH 45435
YU, PW
.
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES,
1982,
30
(07)
:949
-955
[7]
ORIGIN OF THE 0.82-EV ELECTRON TRAP IN GAAS AND ITS ANNIHILATION BY SHALLOW DONORS
[J].
LAGOWSKI, J
论文数:
0
引用数:
0
h-index:
0
LAGOWSKI, J
;
GATOS, HC
论文数:
0
引用数:
0
h-index:
0
GATOS, HC
;
PARSEY, JM
论文数:
0
引用数:
0
h-index:
0
PARSEY, JM
;
WADA, K
论文数:
0
引用数:
0
h-index:
0
WADA, K
;
KAMINSKA, M
论文数:
0
引用数:
0
h-index:
0
KAMINSKA, M
;
WALUKIEWICZ, W
论文数:
0
引用数:
0
h-index:
0
WALUKIEWICZ, W
.
APPLIED PHYSICS LETTERS,
1982,
40
(04)
:342
-344
[8]
FAST CAPACITANCE TRANSIENT APPARATUS - APPLICATION TO ZNO AND O CENTERS IN GAP PARANORMAL JUNCTIONS
[J].
LANG, DV
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
BELL TEL LABS INC,MURRAY HILL,NJ 07974
LANG, DV
.
JOURNAL OF APPLIED PHYSICS,
1974,
45
(07)
:3014
-3022
[9]
INVESTIGATION OF SN-DOPED GAAS EPILAYERS GROWN BY LOW-PRESSURE METAL-ORGANIC CHEMICAL VAPOR-DEPOSITION
[J].
LEE, MK
论文数:
0
引用数:
0
h-index:
0
LEE, MK
;
CHANG, CY
论文数:
0
引用数:
0
h-index:
0
CHANG, CY
;
SU, YK
论文数:
0
引用数:
0
h-index:
0
SU, YK
.
APPLIED PHYSICS LETTERS,
1983,
42
(01)
:88
-89
[10]
EFFECT OF GAS-PHASE STOICHIOMETRY ON DEEP LEVELS IN VAPOR-GROWN GAAS
[J].
MILLER, MD
论文数:
0
引用数:
0
h-index:
0
机构:
RCA LABS,PRINCETON,NJ 08540
RCA LABS,PRINCETON,NJ 08540
MILLER, MD
;
OLSEN, GH
论文数:
0
引用数:
0
h-index:
0
机构:
RCA LABS,PRINCETON,NJ 08540
RCA LABS,PRINCETON,NJ 08540
OLSEN, GH
;
ETTENBERG, M
论文数:
0
引用数:
0
h-index:
0
机构:
RCA LABS,PRINCETON,NJ 08540
RCA LABS,PRINCETON,NJ 08540
ETTENBERG, M
.
APPLIED PHYSICS LETTERS,
1977,
31
(08)
:538
-540
←
1
2
3
→