SPUTTERING OF METALS WITH LOW-ENERGY INERT GAS IONS - POSSIBLE INFLUENCE OF TRAPPED GAS

被引：4

作者：

SINHA, MK

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来源：

JOURNAL OF APPLIED PHYSICS | 1968年 / 39卷 / 04期

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D O I：

10.1063/1.1656508

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：2150 / &

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[1] SPUTTERING OF ALKALI ATOMS BY INERT GAS IONS OF LOW ENERGY
BRADLEY, RC
[J]. PHYSICAL REVIEW, 1954, 93 (04): : 719 - 728
[2] THERMAL DESORPTION OF INERT GASES FROM TUNGSTEN MONOCRYSTALS - (ANISOTROPY 50 EV TO 5 KEV ION BOMBARDMENT E)
KORNELSEN, EV
SINHA, MK
[J]. APPLIED PHYSICS LETTERS, 1966, 9 (03) : 112 - +
[3] IONIC ENTRAPMENT + THERMAL DESORPTION OF INERT GASES IN TUNGSTEN FOR KINETIC ENERGIES OF 40 EV TO 5 KEV
KORNELSEN, EV
[J]. CANADIAN JOURNAL OF PHYSICS, 1964, 42 (02) : 364 - &
[4] KORNELSEN EV, UNPUBLISHED
[5] SPUTTERING YIELDS OF SINGLE CRYSTALS BOMBARDED BY 1- TO 10-KEV AR+ IONS
MAGNUSON, GD
CARLSTON, CE
[J]. JOURNAL OF APPLIED PHYSICS, 1963, 34 (11) : 3267 - &
[6] BOMBARDMENT OF GOLD FILMS BY INERT GAS IONS
OGILVIE, GJ
THOMSON, AA
SANDERS, JV
[J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1963, 24 (02) : 247 - &
[7] SPUTTERING YIELDS FOR LOW ENERGY HE+-, KR+-, AND XE+-ION BOMBARDMENT
ROSENBERG, D
WEHNER, GK
[J]. JOURNAL OF APPLIED PHYSICS, 1962, 33 (05) : 1842 - &
[8] SPUTTERING OF GOLD BY LOW ENERGY INERT GAS IONS
SCOTT, HG
[J]. JOURNAL OF APPLIED PHYSICS, 1962, 33 (06) : 2011 - &
[9] SPUTTERING OF GOLD BY LOW-ENERGY INERT GAS IONS-2
SCOTT, HG
[J]. JOURNAL OF APPLIED PHYSICS, 1966, 37 (01) : 287 - &
[10] SPUTTERING EXPERIMENTS WITH 1- TO 5-KEV AR+ IONS
SOUTHERN, AL
ROBINSON, MT
WILLIS, WR
[J]. JOURNAL OF APPLIED PHYSICS, 1963, 34 (01) : 153 - &