GROWTH OF DIAMOND THIN-FILMS ON SILICON AND TEM OBSERVATION OF THE INTERFACE

被引：32

作者：

KOBAYASHI, K ^{[1
]}

KARASAWA, S ^{[1
]}

WATANABE, T ^{[1
]}

TOGASHI, F ^{[1
]}

机构：

[1] SCI UNIV TOKYO,SHINJUKU KU,TOKYO 162,JAPAN

来源：

JOURNAL OF CRYSTAL GROWTH | 1990年 / 99卷 / 1-4期

关键词：

D O I：

10.1016/S0022-0248(08)80110-8

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

Diamond thin films have been synthesized on silicon substrates by electron assisted chemical vapour deposition (EACVD). The influence of conditions of synthesis on the crystallinity of the films was examined by laser Raman spectroscopy. From these results, the optimum conditions for synthesis were determined. Transmission electron microscopy (TEM) was used to observe film/substrate interfaces of films which were synthesized under optimum conditions. An amorphous intermediate layer was observed between the silicon substrate and the diamond film. © 1990, Elsevier Science Publishers B.V.. All rights reserved.

引用

页码：1211 / 1214

页数：4

共 7 条

[1] DIAMOND SYNTHESIS FROM GAS-PHASE IN MICROWAVE PLASMA
KAMO, M
SATO, Y
MATSUMOTO, S
SETAKA, N
[J]. JOURNAL OF CRYSTAL GROWTH, 1983, 62 (03) : 642 - 644
[2] INFLUENCE OF SUBSTRATE-TEMPERATURES AND ATMOSPHERIC-TEMPERATURES ON DIAMOND DEPOSITION
KANEKO, H
KAMADA, M
KUWAE, R
SAWABE, A
INUZUKA, T
[J]. APPLIED SURFACE SCIENCE, 1988, 33-4 : 546 - 552
[3] GROWTH OF DIAMOND PARTICLES FROM METHANE-HYDROGEN GAS
MATSUMOTO, S
SATO, Y
TSUTSUMI, M
SETAKA, N
[J]. JOURNAL OF MATERIALS SCIENCE, 1982, 17 (11) : 3106 - 3112
[4] GROWTH OF DIAMOND THIN-FILMS BY ELECTRON-ASSISTED CHEMICAL VAPOR-DEPOSITION AND THEIR CHARACTERIZATION
SAWABE, A
INUZUKA, T
[J]. THIN SOLID FILMS, 1986, 137 (01) : 89 - 99
[5] SUZUKI H, 1986, J JPN SOC POWDER POW, V33, P281
[6] GROWTH OF DIAMOND THIN-FILMS BY DC PLASMA CHEMICAL VAPOR-DEPOSITION
SUZUKI, K
SAWABE, A
YASUDA, H
INUZUKA, T
[J]. APPLIED PHYSICS LETTERS, 1987, 50 (12) : 728 - 729
[7] CHARACTERIZATION OF DIAMOND THIN-FILMS - DIAMOND PHASE IDENTIFICATION, SURFACE-MORPHOLOGY, AND DEFECT STRUCTURES
WILLIAMS, BE
GLASS, JT
[J]. JOURNAL OF MATERIALS RESEARCH, 1989, 4 (02) : 373 - 384

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