VISIBLE-LASER PHOTODEPOSITION OF CHROMIUM-OXIDE FILMS AND SINGLE-CRYSTALS

被引：34

作者：

ARNONE, C

ROTHSCHILD, M

BLACK, JG

EHRLICH, DJ

机构：

来源：

关键词：

D O I：

10.1063/1.96622

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1018 / 1020

页数：3

共 13 条

[1] Allen S. D., 1983, Laser Diagnostics and Photochemical Processing for Semiconductor Devices. Proceedings of a Symposium, P207
[2] LASER GROWN SINGLE-CRYSTALS OF SILICON
BAUERLE, D
LEYENDECKER, G
WAGNER, D
BAUSER, E
LU, YC
[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1983, 30 (03): : 147 - 149
[3] LOW-PRESSURE GROWTH AND PROPERTIES OF CRO2 ON A1203
BENDOR, L
SHIMONY, Y
[J]. JOURNAL OF CRYSTAL GROWTH, 1974, 24 (OCT) : 175 - 178
[4] EHRLICH DJ, 1983, J VAC SCI TECHNOL B, V1, P969, DOI 10.1116/1.582718
[5] A FLASH-PHOTOLYSIS STUDY OF CHROMYL CHLORIDE
HALONBRE.R
HUBER, JR
WILD, U
GUNTHARD, HH
[J]. JOURNAL OF PHYSICAL CHEMISTRY, 1968, 72 (11) : 3929 - &
[6] IBASHI S, 1976, AIP C P, V34, P43
[7] PHOTOCHEMICAL GENERATION AND DEPOSITION OF COPPER FROM A GAS-PHASE PRECURSOR
JONES, CR
HOULE, FA
KOVAC, CA
BAUM, TH
[J]. APPLIED PHYSICS LETTERS, 1985, 46 (01) : 97 - 99
[8] DECOMPOSITION OF HIGHER OXIDES OF CHROMIUM UNDER VARIOUS PRESSURES OF OXYGEN
KUBOTA, B
[J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1961, 44 (05) : 239 - 248
[9] EMISSION-SPECTROSCOPY AND EXCITED-STATE DYNAMICS OF CHROMYL-CHLORIDE VAPOR
MCDONALD, JR
[J]. CHEMICAL PHYSICS, 1975, 9 (03) : 423 - 434
[10] REPAIR OF X-RAY-LITHOGRAPHY MASKS USING UV-LASER PHOTODEPOSITION
RANDALL, JN
EHRLICH, DJ
TSAO, JY
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01): : 262 - 264