REPAIR OF X-RAY-LITHOGRAPHY MASKS USING UV-LASER PHOTODEPOSITION

[1] ONE-STEP REPAIR OF TRANSPARENT DEFECTS IN HARD-SURFACE PHOTOLITHOGRAPHIC MASKS VIA LASER PHOTODEPOSITION [J]. ELECTRON DEVICE LETTERS, 1980, 1 (06): : 101 - 103

[2] EHRLICH DJ, 1983, J VAC SCI TECHNOL B, V1, P969, DOI 10.1116/1.582718

[3] POLYIMIDE MEMBRANE X-RAY LITHOGRAPHY MASKS - FABRICATION AND DISTORTION MEASUREMENTS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (03): : 995 - 997

[4] HOULE FA, 1984, JUN C LAS EL OPT AN

[5] PHOTODEPOSITION FROM TETRA ETHYL LEAD [J]. TRANSACTIONS OF THE FARADAY SOCIETY, 1969, 65 (561P): : 2421 - &

[6] Robinson J W, 1974, HDB SPECTROSCOPY

[7] TSAO JY, UNPUB SURF SCI

[8] TSAO JY, UNPUB SPIE P

[9] WAGNER A, 1983, SPIE J, V393, P167

[1] ONE-STEP REPAIR OF TRANSPARENT DEFECTS IN HARD-SURFACE PHOTOLITHOGRAPHIC MASKS VIA LASER PHOTODEPOSITION [J]. ELECTRON DEVICE LETTERS, 1980, 1 (06): : 101 - 103

[2] EHRLICH DJ, 1983, J VAC SCI TECHNOL B, V1, P969, DOI 10.1116/1.582718

[3] POLYIMIDE MEMBRANE X-RAY LITHOGRAPHY MASKS - FABRICATION AND DISTORTION MEASUREMENTS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (03): : 995 - 997

[4] HOULE FA, 1984, JUN C LAS EL OPT AN

[5] PHOTODEPOSITION FROM TETRA ETHYL LEAD [J]. TRANSACTIONS OF THE FARADAY SOCIETY, 1969, 65 (561P): : 2421 - &

[6] Robinson J W, 1974, HDB SPECTROSCOPY

[7] TSAO JY, UNPUB SURF SCI

[8] TSAO JY, UNPUB SPIE P

[9] WAGNER A, 1983, SPIE J, V393, P167