TURNING PERFORMANCE OF REACTIVELY ION PLATED TI-N COATINGS

被引:9
作者
MOLARIUS, JM
KORHONEN, AS
KANKAANPAA, H
SULONEN, MS
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 06期
关键词
D O I
10.1116/1.573706
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:2686 / 2690
页数:5
相关论文
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