INFLUENCE OF SUBSTRATE BIAS ON COMPOSITION AND STRUCTURE OF REACTIVELY R.F.-SPUTTERED TIC FILMS

被引：48

作者：

SUNDGREN, JE

JOHANSSON, BO

KARLSSON, SE

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(81)90209-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：77 / 83

页数：7

共 13 条

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[5] THE EFFECTS OF SUBSTRATE BIAS ON THE STRUCTURAL AND ELECTRICAL-PROPERTIES OF TIN FILMS PREPARED BY REACTIVE RF SPUTTERING
IGASAKI, Y
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[J]. THIN SOLID FILMS, 1980, 70 (01) : 17 - 25
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[9] HIGH-RATE THICK-FILM GROWTH
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