GROWTH AND PROPERTIES OF GLOW-DISCHARGE HYDROGENATED AMORPHOUS-SILICON CARBON ALLOYS FROM SILANE PROPANE MIXTURES

被引：4

作者：

QAYYUM, A

WILSON, JIB

IBRAHIM, K

ALSABBAGH, SK

EICKER, U

机构：

来源：

THIN SOLID FILMS | 1988年 / 164卷

关键词：

D O I：

10.1016/0040-6090(88)90139-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：221 / 226

页数：6

共 10 条

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