ROLE OF THERMAL-CONDUCTIVITY AND OPTICAL-ABSORPTION COEFFICIENT OF AMORPHOUS-SILICON IN PULSED LASER MELTING

被引：3

作者：

ONG, CK

TAN, HS

SIN, EH

机构：

来源：

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 1988年 / 103卷 / 02期

关键词：

D O I：

10.1016/0025-5416(88)90517-4

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：273 / 276

页数：4

共 14 条

[1]

Baeri P., 1982, Laser annealing of semiconductors, P75

[2] STRUCTURAL, OPTICAL, AND ELECTRICAL PROPERTIES OF AMORPHOUS SILICON FILMS [J].

BRODSKY, MH ;

TITLE, RS ;

WEISER, K ;

PETTIT, GD .

PHYSICAL REVIEW B, 1970, 1 (06) :2632-&

[3] HEAT OF CRYSTALLIZATION AND MELTING-POINT OF AMORPHOUS-SILICON [J].

DONOVAN, EP ;

SPAEPEN, F ;

TURNBULL, D ;

POATE, JM ;

JACOBSON, DC .

APPLIED PHYSICS LETTERS, 1983, 42 (08) :698-700

[4] THERMAL-CONDUCTIVITY OF AMORPHOUS-SILICON [J].

GOLDSMID, HJ ;

KAILA, MM ;

PAUL, GL .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1983, 76 (01) :K31-K33

[5] PULSED-LASER MELTING OF AMORPHOUS-SILICON - TIME-RESOLVED MEASUREMENTS AND MODEL-CALCULATIONS [J].

LOWNDES, DH ;

WOOD, RF ;

NARAYAN, J .

PHYSICAL REVIEW LETTERS, 1984, 52 (07) :561-564

[6] PULSED EXCIMER (KRF) LASER MELTING OF AMORPHOUS AND CRYSTALLINE SILICON LAYERS [J].

NARAYAN, J ;

WHITE, CW ;

AZIZ, MJ ;

STRITZKER, B ;

WALTHUIS, A .

JOURNAL OF APPLIED PHYSICS, 1985, 57 (02) :564-567

[7] HEAT-FLOW CALCULATION OF PULSED EXCIMER ULTRAVIOLET-LASERS MELTING OF AMORPHOUS AND CRYSTALLINE SILICON SURFACES [J].

ONG, CK ;

SIN, EH ;

TAN, HS .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1986, 3 (05) :812-814

[8]

ONG CK, 1986, MATER SCI ENG, V78, P79

[9] ELECTRONIC-STRUCTURE OF AMORPHOUS SI FROM PHOTOEMISSION AND OPTICAL STUDIES [J].

PIERCE, DT ;

SPICER, WE .

PHYSICAL REVIEW B, 1972, 5 (08) :3017-&

[10] TEMPERATURE-DEPENDENCE OF INTERBAND OPTICAL-ABSORPTION OF SILICON AT 1152, 1064, 750, AND 694 NM [J].

SIN, EH ;

ONG, CK ;

TAN, HS .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1984, 85 (01) :199-204

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