VERY HIGH-VOLTAGE (500 KV) ELECTRON-BEAM LITHOGRAPHY FOR THICK RESISTS AND HIGH-RESOLUTION

被引：22

作者：

JONES, GAC

BLYTHE, S

AHMED, H

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 01期

关键词：

D O I：

10.1116/1.583844

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：120 / 123

页数：4

共 12 条

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