LARGE-AREA MICROWAVE AND RADIOFREQUENCY PLASMA-ETCHING OF POLYMERS

被引：25

作者：

WROBEL, AM

LAMONTAGNE, B

WERTHEIMER, MR

机构：

[1] ECOLE POLYTECH,COUCHES MINCES GRP,MONTREAL H3C 3A7,QUEBEC,CANADA

[2] POLISH ACAD SCI,CTR MOLEC & MACROMOLEC STUDIES,PL-90362 LODZ,POLAND

[3] ECOLE POLYTECH,DEPT ENGN PHYS,MONTREAL H3C 3A7,QUEBEC,CANADA

来源：

PLASMA CHEMISTRY AND PLASMA PROCESSING | 1988年 / 8卷 / 03期

关键词：

D O I：

10.1007/BF01020409

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：315 / 329

页数：15

共 19 条

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