ELECTROSTATIC-PROBE MEASUREMENTS IN THE GLOW-DISCHARGE PLASMA OF A DC MAGNETRON SPUTTERING SYSTEM

被引：68

作者：

PETROV, I

ORLINOV, V

IVANOV, I

KOURTEV, J

机构：

来源：

CONTRIBUTIONS TO PLASMA PHYSICS | 1988年 / 28卷 / 02期

关键词：

D O I：

10.1002/ctpp.2150280207

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

引用

页码：157 / 167

页数：11

共 16 条

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