BENZOCYCLOBUTENE (BCB) DIELECTRICS FOR THE FABRICATION OF HIGH-DENSITY, THIN-FILM MULTICHIP MODULES

被引:106
作者
BURDEAUX, D [1 ]
TOWNSEND, P [1 ]
CARR, J [1 ]
GARROU, P [1 ]
机构
[1] DOW CHEM CO USA,CENT RES,CHARLOTTE,NC 28210
关键词
BENZOCYCLOBUTENE; BCB; MULTICHIP MODULE; DIELECTRIC;
D O I
10.1007/BF02662825
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A new class of organic dielectrics, benzocyclobutenes, 1, are described and their application to the fabrication of thin film multichip modules is detailed. Key properties for 3, a siloxy containing BCB derivative include low dielectric constant (2.7), low loss (0.008 at 1 MHz), low water absorption (0.25% after 24 h water boil) and high degree of planarization (> 90% from one layer coverage). All other properties meet the requirements necessary for fabrication of thin film MCM structures.
引用
收藏
页码:1357 / 1364
页数:8
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