INTERFACE EFFECTS AND HIGH CONDUCTIVITY IN OXIDES GROWN FROM POLYCRYSTALLINE SILICON

被引:112
作者
DIMARIA, DJ
KERR, DR
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
[2] IBM CORP,SYST PROD DIV,E FISHKILL FACIL,HOPEWELL JUNCTION,NY 12533
关键词
D O I
10.1063/1.88536
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:505 / 507
页数:3
相关论文
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