ELECTROOPTICAL EFFECT IN ALUMINUM NITRIDE WAVE-GUIDES

被引：44

作者：

GRAUPNER, P ^{[1
]}

POMMIER, JC ^{[1
]}

CACHARD, A ^{[1
]}

COUTAZ, JL ^{[1
]}

机构：

[1] UNIV ST ETIENNE, TSI, F-42023 ST ETIENNE 2, FRANCE

来源：

JOURNAL OF APPLIED PHYSICS | 1992年 / 71卷 / 09期

关键词：

D O I：

10.1063/1.350844

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We fabricated thin optical layers in aluminum nitride by magnetron sputtering. Using the techniques of integrated optics, we characterized the layers and we determined the electro-optic coefficients of AlN:r13 = 0.67 pm/V and r33 = -0.59 pm/V.

引用

页码：4136 / 4139

页数：4

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