CROSS-SECTIONING OF LAYERED THIN-FILMS BY ULTRAMICROTOMY

被引:8
作者
MARSHALL, AF [1 ]
DOBBERTIN, DC [1 ]
机构
[1] IBM CORP,RES LAB,SAN JOSE,CA 95193
关键词
D O I
10.1016/0304-3991(86)90008-2
中图分类号
TH742 [显微镜];
学科分类号
摘要
引用
收藏
页码:69 / 73
页数:5
相关论文
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