MULTIPLE-ENERGY ION-IMPLANTATION EFFECTS ON DISTRIBUTION PROFILES - A MONTE-CARLO CASE-STUDY

被引：5

作者：

GOKTEPE, OF

机构：

[1] US Naval Surface Weapons Cent,, Silver Spring, MD, USA, US Naval Surface Weapons Cent, Silver Spring, MD, USA

来源：

MATERIALS SCIENCE AND ENGINEERING | 1985年 / 69卷 / 01期

关键词：

D O I：

10.1016/0025-5416(85)90366-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：13 / 20

页数：8

共 43 条

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