RECOIL IMPLANTATION YIELDS AND DEPTH PROFILES - ANALYTICAL EXPRESSIONS FOR PRIMARY AND CASCADE CONTRIBUTIONS

被引:15
作者
GRASMARTI, A
机构
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1983年 / 76卷 / 02期
关键词
D O I
10.1002/pssa.2210760226
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:621 / 627
页数:7
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