AN X-RAY-DIFFRACTION METHOD FOR MEASURING THICKNESSES OF EPITAXIAL THIN-FILMS

被引：15

作者：

CHAUDHURI, J ^{[1
]}

SHAH, S ^{[1
]}

HARBISON, JP ^{[1
]}

机构：

[1] BELLCORE,RED BANK,NJ 07701

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 11期

关键词：

D O I：

10.1063/1.343732

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5373 / 5375

页数：3

共 11 条

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[9]

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[10] DYNAMICS OF FILM GROWTH OF GAAS BY MBE FROM RHEED OBSERVATIONS [J].

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