SENSITIVE, NONINTRUSIVE, INSITU MEASUREMENT OF TEMPORALLY AND SPATIALLY RESOLVED PLASMA ELECTRIC-FIELDS

被引：141

作者：

MOORE, CA ^{[1
]}

DAVIS, GP ^{[1
]}

GOTTSCHO, RA ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

关键词：

D O I：

10.1103/PhysRevLett.52.538

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：538 / 541

页数：4

共 13 条

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[3] CARBON-TETRACHLORIDE PLASMA-ETCHING OF GAAS AND INP - A KINETIC-STUDY UTILIZING NONPERTURBATIVE OPTICAL TECHNIQUES
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[5] GOTTSCHO RA, UNPUB
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[10] SCRAMBLER PLATES USED TO DEPOLARIZE VISIBLE RADIATION
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