ON THE MECHANISM OF DEPOSITION OF HARD A-C-H FILMS BY RF-PLASMA DECOMPOSITION OF HYDROCARBONS

被引：4

作者：

WENDLER, B

机构：

[1] Technical Univ of Lodz, Lodz, Pol, Technical Univ of Lodz, Lodz, Pol

来源：

VACUUM | 1986年 / 36卷 / 1-3期

关键词：

D O I：

10.1016/0042-207X(86)90281-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：107 / 109

页数：3

共 10 条

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Seitz F., 1957, PROGR SOLID STATE PH, V2, P30

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[9] ION-BASED GROWTH OF SPECIAL FILMS - TECHNIQUES AND MECHANISMS [J].

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[10] PLASMA POLYMERIZATION INVESTIGATED BY COMPARISON OF HYDROCARBONS AND PERFLUOROCARBONS [J].

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