ION-BASED GROWTH OF SPECIAL FILMS - TECHNIQUES AND MECHANISMS

被引：93

作者：

WEISSMANTEL, C

机构：

来源：

THIN SOLID FILMS | 1982年 / 92卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(82)90187-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：55 / 63

页数：9

共 19 条

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[7]

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