A DETAILED ANALYSIS OF THE OPTICAL BEAM DEFLECTION TECHNIQUE FOR USE IN ATOMIC FORCE MICROSCOPY

被引：197

作者：

PUTMAN, CAJ

DEGROOTH, BG

VANHULST, NF

GREVE, J

机构：

[1] Department of Applied Physics, University of Twente, 7500 AE Enschede

来源：

JOURNAL OF APPLIED PHYSICS | 1992年 / 72卷 / 01期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1063/1.352149

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A Michelson interferometer and an optical beam deflection configuration (both shot noise and diffraction limited) are compared for application in an atomic force microscope. The comparison shows that the optical beam deflection method and the interferometer have essentially the same sensitivity. This remarkable result is explained by indicating the physical equivalence of both methods. Furthermore, various configurations using optical beam deflection are discussed. All the setups are capable of detecting the cantilever displacements with atomic resolution in a 10 kHz bandwidth.

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页码：6 / 12

页数：7

相关论文

共 20 条

[1] MICROFABRICATION OF CANTILEVER STYLI FOR THE ATOMIC FORCE MICROSCOPE [J].

ALBRECHT, TR ;

AKAMINE, S ;

CARVER, TE ;

QUATE, CF .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (04) :3386-3396

[2] AN ATOMIC-RESOLUTION ATOMIC-FORCE MICROSCOPE IMPLEMENTED USING AN OPTICAL-LEVER [J].

ALEXANDER, S ;

HELLEMANS, L ;

MARTI, O ;

SCHNEIR, J ;

ELINGS, V ;

HANSMA, PK ;

LONGMIRE, M ;

GURLEY, J .

JOURNAL OF APPLIED PHYSICS, 1989, 65 (01) :164-167

[3] ATOMIC FORCE MICROSCOPE [J].

BINNIG, G ;

QUATE, CF ;

GERBER, C .

PHYSICAL REVIEW LETTERS, 1986, 56 (09) :930-933

[4]

Born M., 1964, PRINCIPLES OPTICS

[5] SCANNING FORCE MICROSCOPY USING A SIMPLE LOW-NOISE INTERFEROMETER [J].

DENBOEF, AJ .

APPLIED PHYSICS LETTERS, 1989, 55 (05) :439-441

[6]

DENBOEF AJ, 1990, THESIS EINDHOVEN NET

[7] IMAGING CRYSTALS, POLYMERS, AND PROCESSES IN WATER WITH THE ATOMIC FORCE MICROSCOPE [J].

DRAKE, B ;

PRATER, CB ;

WEISENHORN, AL ;

GOULD, SAC ;

ALBRECHT, TR ;

QUATE, CF ;

CANNELL, DS ;

HANSMA, HG ;

HANSMA, PK .

SCIENCE, 1989, 243 (4898) :1586-1589

[8] ATOMIC FORCE MICROSCOPY USING OPTICAL INTERFEROMETRY [J].

ERLANDSSON, R ;

MCCLELLAND, GM ;

MATE, CM ;

CHIANG, S .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (02) :266-270

[9] MAGNETIC IMAGING BY FORCE MICROSCOPY WITH 1000-A RESOLUTION [J].

MARTIN, Y ;

WICKRAMASINGHE, HK .

APPLIED PHYSICS LETTERS, 1987, 50 (20) :1455-1457

[10] OPTICAL-BEAM-DEFLECTION ATOMIC FORCE MICROSCOPY - THE NACL (001) SURFACE [J].

MEYER, G ;

AMER, NM .

APPLIED PHYSICS LETTERS, 1990, 56 (21) :2100-2101