SUPPRESSION OF DEFECT FORMATION IN GAAS LAYERS BY REMOVING OXYGEN IN LPE

被引:21
作者
ISHII, M
KAN, H
SUSAKI, W
OGATA, Y
机构
[1] MITSUBISHI ELECT CORP,CENT RES LAB,ITAMI,HYOGO,JAPAN
[2] MITSUBISHI ELECT CORP,CENT RES LAB,AMAGASAKI,HYOGO,JAPAN
关键词
D O I
10.1063/1.89092
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:375 / 377
页数:3
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